65 références
Année 2024
Année 2022
- Kinetics driving nanocomposite thin-film deposition in low-pressure misty plasma processes.
S. Chouteau, M. Mitronika, A. Goullet, M. Richard-Plouet, L. Stafford and A. Granier. J. Phys. D Appl. Phys. 2022, 55
- Low-temperature deposition of self-cleaning anatase TiO2 coatings on polymer glazing via sequential continuous and pulsed PECVD.
Benjamin Dey, Simon Bulou, William Ravisy, Nicolas Gautier, Mireille Richard-Plouet, Agnes Granier and Patrick Choquet. Surf. Coat. Technol. 2022, 436, 128256
Année 2021
- Hybrid approaches coupling sol-gel and plasma for the deposition of oxide-based nanocomposite thin films: a review.
Maria Mitronika, Agnes Granier, Antoine Goullet and Mireille Richard-Plouet. SN Appl. Sci. 2021, 3, 665
- Unveiling a critical thickness in photocatalytic TiO2 thin films grown by plasma-enhanced chemical vapor deposition using real time in situ spectroscopic ellipsometry.
W. Ravisy, M. Richard-Plouet, B. Dey, S. Bulou, P. Choquet, A. Granier and A. Goullet. J. Phys. D: Appl. Phys. 2021, 54, 445303
- TiO2-SiO2 nanocomposite thin films deposited by direct liquid injection of colloidal solution in an O-2/HMDSO low-pressure plasma.
Maria Mitronika, Jacopo Profili, Antoine Goullet, Nicolas Gautier, Nicolas Stephant, Luc Stafford, Agnes Granier and Mireille Richard-Plouet. J. Phys. D: Appl. Phys. 2021, 54, 085206
Année 2020
- Anatase TiO2 deposited at low temperature by pulsing an electron cyclotron wave resonance plasma source.
B. Dey, S. Bulou, T. Gaulain, W. Ravisy, M. Richard-Plouet, A. Goullet, A. Granier and P. Choquet. Sci Rep 2020, 10, 21952
- Modification of the optical properties and nano-crystallinity of anatase TiO2nanoparticles thin film using low pressure O2 plasma treatment.
M. Mitronika, J. Profili, A. Goullet, L. Stafford, A. Granier and M. Richard-Plouet. Thin Solid Films 2020, 709, 138212
- Plasma deposition-Impact of ions in plasma enhanced chemical vapor deposition, plasma enhanced atomic layer deposition, and applications to area selective deposition.
Christophe Vallee, Marceline Bonvalot, Samia Belahcen, Taguhi Yeghoyan, Moustapha Jaffal, Rémi Vallat, Ahmad Chaker, Gautier Lefèvre, Sylvain David, Ahmad Bsiesy, Nicolas Posseme, Rémy Gassilloud and Agnes Granier. Journal of Vacuum Science & Technology A 2020, 38, 033007
- Unravelling local environments in mixed TiO2-SiO2 thin films by XPS and ab initio calculations.
Pavel Ondracka, David Necas, Michele Carette, Stephane Elisabeth, David Holec, Agnes Granier, Antoine Goullet, Lenka Zajickova and Mireille Richard-Plouet. Appl. Surf. Sci. 2020, 510, 145056
Année 2019
- Ion impingement effect on the structure and optical properties of TixSi1-xO2 films deposited by ICP-PECVD.
Dayu Li, Shuyu Dai, Antoine Goullet and Agnes Granier. Plasma Processes Polym. 2019, 16, 1900034
- TEM analysis of photocatalytic TiO2 thin films deposited on polymer substrates by low-temperature ICP-PECVD.
D. Li, N. Gautier, B. Dey, S. Bulou, M. Richard-Plouet, W. Ravisy, A. Goullet, P. Choquet and A. Granier. Appl. Surf. Sci. 2019, 491, 116-122
- Nanostructure and photocatalytic properties of TiO2 films deposited at low temperature by pulsed PECVD.
D. Li, S. Bulou, N. Gautier, S. Elisabeth, A. Goullet, M. Richard-Plouet, P. Choquet and A. Granier. Appl. Surf. Sci. 2019, 466, 63-69
Année 2018
- The Effect of Plasma Gas Composition on the Nanostructures and Optical Properties of TiO2 Films Prepared by Helicon-PECVD.
D. Li, S. Dai, A. Goullet and A. Granier. Nano 2018, 13, 1850124
- Microstructure and Photocatalytic Properties of TiO2-Reduced Graphene Oxide Nanocomposites Prepared by Solvothermal Method.
D. Li, S. Dai, J. Li, C. Zhang, M. Richard-Plouet, A. Goullet and A. Granier. J. Electron. Mater. 2018, 47, 7372-7379
- Annealing and biasing effects on the structural and optical properties of PECVD-grown TiO2 films from TTIP/O-2 plasma.
D. Li, S. Dai, A. Goullet, M. Carette, A. Granier and J P. Landesman. Journal of Materials Science-Materials in Electronics 2018, 29, 13254-13264
Année 2017
Année 2016
- Structural and Optical Properties of PECVD TiO2-SiO2 Mixed Oxide Films for Optical Applications.
Dayu Li, Stephane Elisabeth, Agnes Granier, Michele Carette, Antoine Goullet and Jean-Pierre Landesman. Plasma Process. Polym. 2016, 13, 918-928
- Effect of growth interruptions on TiO2 films deposited by plasma enhanced chemical vapour deposition.
D. Li, A. Goullet, M. Carette, A. Granier and J P. Landesman. Mater. Chem. Phys. 2016, 182, 409-417
- Structural and optical properties of RF-biased PECVD TiO2 thin films deposited in an O-2/TTIP helicon reactor.
D. Li, A. Goullet, M. Carette, A. Granier, Y. Zhang and J P. Landesman. Vacuum 2016, 131, 231-239
- Creating nanoporosity in silver nanocolumns by direct exposure to radio-frequency air plasma.
Abdel-Aziz El Mel, Nicolas Stephant, Jonathan Hamon, Damien Thiry, Adrien Chauvin, Meriem Chettab, Eric Gautron, Stephanos Konstantinidis, Agnes Granier and Pierre-Yves Tessier. Nanoscale 2016, 8, 141-148
Année 2015
Année 2014
- Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools.
A A. El Mel, E. Gautron, F. Christien, B. Angleraud, A. Granier, P. Soucek, P. Vasina, V. Bursikova, M. Takashima, N. Ohtake, H. Akasaka, T. Suzuki and P Y. Tessier. Surf. Coat. Technol. 2014, 256, 41-46
Année 2013
- X-ray reflectometry study of diamond-like carbon films prepared by plasma enhanced chemical vapor deposition in a low pressure inductively coupled plasma.
F. Salah, B. Harzallah, A. van der Lee, B. Angleraud, T. Begou and A. Granier. Thin Solid Films 2013, 537, 102-107
- H atom surface loss kinetics in pulsed inductively coupled plasmas.
S. Jacq, C. Cardinaud, L. Le Brizoual and A. Granier. Plasma Sources Sci. Technol. 2013, 22, 055004
- In situ spectroscopic ellipsometry study of TiO2 films deposited by plasma enhanced chemical vapour deposition.
D. Li, M. Carette, A. Granier, J P. Landesman and A. Goullet. Appl. Surf. Sci. 2013, 283, 234-239
Année 2012
- Shape control of nickel nanostructures incorporated in amorphous carbon films: From globular nanoparticles toward aligned nanowires.
A A. El Mel, N. Bouts, E. Grigore, E. Gautron, A. Granier, B. Angleraud and P Y. Tessier. J. Appl. Phys. 2012, 111, 114309
- Fabrication of a nickel nanowire mesh electrode suspended on polymer substrate.
A A. El Mel, E. Gautron, B. Angleraud, A. Granier, W. Xu, C H. Choi, K J. Briston, B J. Inkson and P Y. Tessier. Nanotechnology 2012, 23, 275603
- Structural characterization and electrochemical behavior of titanium carbon thin films.
E. Grigore, C. Delacote, A A. El Mel, M. Boujtita, A. Granier and P Y. Tessier. Surf. Coat. Technol. 2012, 211, 192-195
- The influence of Ni content on the characteristics of C-Ni thin films.
E. Grigore, A A. El Mel, A. Granier and P Y. Tessier. Surf. Coat. Technol. 2012, 211, 188-191
- Spectroscopic ellipsometry analysis of TiO2 films deposited by plasma enhanced chemical vapor deposition in oxygen/titanium tetraisopropoxide plasma.
D. Li, M. Carette, A. Granier, J P. Landesman and A. Goullet. Thin Solid Films 2012, 522, 366-371
- Highly ordered ultralong magnetic nanowires wrapped in stacked graphene layers.
Abdel-Aziz El Mel, Jean-Luc Duvail, Eric Gautron, Wei Xu, Chang-Hwan Choi, Benoit Angleraud, Agnes Granier and Pierre-Yves Tessier. Beilstein J. Nanotechnol. 2012, 3, 846-851
Année 2011
- XPS study of the surface composition modification of nc-TiC/C nanocomposite films under in situ argon ion bombardment.
A A. El Mel, B. Angleraud, E. Gautron, A. Granier and P Y. Tessier. Thin Solid Films 2011, 519, 3982-3985
- Hierarchical carbon nanostructure design: ultra-long carbon nanofibers decorated with carbon nanotubes.
A A. El Mel, A. Achour, W. Xu, C H. Choi, E. Gautron, B. Angleraud, A. Granier, L. Le Brizoual, M A. Djouadi and P Y. Tessier. Nanotechnology 2011, 22, 435302
- Synthesis of nickel-filled carbon nanotubes at 350 degrees C.
A A. El Mel, E. Gautron, B. Angleraud, A. Granier and P Y. Tessier. CARBON 2011, 49, 4595-4598
Année 2010
- Microstructure and composition of TiC/a-C:H nanocomposite thin films deposited by a hybrid IPVD/PECVD process.
A A. El Mel, B. Angleraud, E. Gautron, A. Granier and P Y. Tessier. Surf. Coat. Technol. 2010, 204, 1880-1883
- Response to "Comments on 'Carbon nanowalls as material for electrochemical tranducers' " [Appl. Phys. Lett. 96 126102 (2010)].
E. Luais, M. Boujtita, A. Gohier, A. Tailleur, S. Casimirius, M A. Djouadi, A. Granier and P Y. Tessier. Appl. Phys. Lett. 2010, 96, 126103
- Titanium carbide/carbon composite nanofibers prepared by a plasma process.
A A. El Mel, E. Gautron, C H. Choi, B. Angleraud, A. Granier and P Y. Tessier. Nanotechnology 2010, 21, 435603
- Preparation and modification of carbon nanotubes electrodes by cold plasmas processes toward the preparation of amperometric biosensors.
E. Luais, C. Thobie-Gautier, A. Tailleur, M -A. Djouadi, A. Granier, P Y. Tessier, D. Debarnot, F. Poncin-Epaillard and M. Boujtita. Electrochim. Acta 2010, 55, 7916-7922
Année 2009
- Influence of Ion Bombardment and Annealing on the Structural and Optical Properties of TiOx Thin Films Deposited in Inductively Coupled TTIP/O-2 Plasma.
Agnes Granier, Thomas Begou, K. Makaoui, Akram Soussou, Bruno Beche, Etienne Gaviot, Marie-Paule Besland and Antoine Goullet. Plasma Process. Polym. 2009, 6, S741-S745
- Early stages of the carbon nanotube growth by low pressure CVD and PE-CVD.
A. Gohier, T M. Minea, S. Point, J -Y. Mevellec, J. Jimenez, M A. Djouadi and A. Granier. Diam. Relat. Mat. 2009, 18, 61-65
- Carbon nanowalls as material for electrochemical transducers.
E. Luais, M. Boujtita, A. Gohier, A. Tailleur, S. Casimirius, M A. Djouadi, A. Granier and P Y. Tessier. Appl. Phys. Lett. 2009, 95, 014104
- Ionized Physical Vapour Deposition combined with PECVD, for synthesis of carbon-metal nanocomposite thin films.
P Y. Tessier, R. Issaoui, E. Luais, M. Boujtita, A. Granier and B. Angleraud. Solid State Sci. 2009, 11, 1824-1827
Année 2008
- Integrated optics based on plasma processed dielectric materials.
T. Begou, B. Beche, J P. Landesman, E. Gaviot, A. Soussou, K. Makaoui, M P. Besland, A. Granier, A. Goullet, J D T. Kruschwitz and M J. Ellison. Advances in {Thin}-{Film} {Coatings} for {Optical} {Applications} {V} 2008, 42, 706705
- Influence of ion bombardment on structural and electrical properties of SiO2 thin films deposited from O-2/HMDSO inductively coupled plasmas under continuous wave and pulsed modes.
A. Bousquet, A. Goullet, C. Leteinturier, N. Coulon and A. Granier. Eur. Phys. J.-Appl. Phys 2008, 42, 3-8
- Kinetics of O and H atoms in pulsed O(2)/HMDSO low pressure PECVD plasmas.
A. Bousquet, A. Granier, G. Cartry and A. Goullet. J. Optoelectron. Adv. Mater. 2008, 10, 1999-2002
- Integration of a carbon nanotube based electrode in silicon microtechnology to fabricate electrochemical transducers.
E. Luais, M. Boujtita, A. Gohier, A. Tailleur, S. Casimirius, M A. Djouadi, A. Granier and P Y. Tessier. Nanotechnology 2008, 19, 435502
Année 2007
- Growth kinetics of low temperature single-wall and few walled carbon nanotubes grown by plasma enhanced chemical vapor deposition.
A. Gohier, T M. Minea, M A. Djouadi, J. Jimenez and A. Granier. Physica E 2007, 37, 34-39
- Impact of the etching gas on vertically oriented single wall and few walled carbon nanotubes by plasma enhanced chemical vapor deposition.
A. Gohier, T M. Minea, M A. Djouadi and A. Granier. J. Appl. Phys. 2007, 101, 054317
- Comparative Study of Films Deposited from HMDSO/O(2) in Continuous Wave and Pulsed rf Discharges.
Lenka Zajickova, Vilma Bursikova, Daniel Franta, Angelique Bousquet, Agnes Granier, Antoine Goullet and Jiri Bursik. Plasma Process. Polym. 2007, 4, S287-S293
- ERDA and structural characterization of oriented multiwalled carbon nanotubes.
A. Gohier, S. Point, M A. Djouadi, A. Granier, T M. Minea, U. Kreissig, G. Abrasonis, A. Kolitsch and W. Moller. J. Phys. Chem. C 2007, 111, 10353-10358
- Investigation of O-atom kinetics in O-2, CO2, H2O and O-2/HMDSO low pressure radiofrequency pulsed plasmas by time-resolved optical emission spectroscopy.
A. Bousquet, G. Cartry and A. Granier. Plasma Sources Sci. Technol. 2007, 16, 597-605
- Single- and few-walled carbon nanotubes grown at temperatures as low as 450 degrees C: Electrical and field emission characterization.
A. Gohier, M A. Djouadi, M. Dubosc, A. Granier, T M. Minea, L. Sirghi, F. Rossi, P. Paredez and F. Alvarez. J. Nanosci. Nanotechnol. 2007, 7, 3350-3353
- Impact of the Cu-based substrates and catalyst deposition techniques on carbon nanotube growth at low temperature by PECVD.
M. Dubosc, S. Casimirius, M -P. Besland, C. Cardinaud, A. Granier, J -L. Duvail, A. Gohier, T. Minea, V. Arnal and J. Torres. Microelectron. Eng. 2007, 84, 2501-2505
- First developments for photonics integrated on plasma-polymer-HMDSO: Single-mode TE00-TM00 straight waveguides.
T. Begou, B. Beche, A. Goullet, J P. Landesman, A. Granier, C. Cardinaud, E. Gaviot, L. Camberlein, N. Grossard, G. Jezequel and J. Zyss. Opt. Mater. 2007, 30, 657-661
Année 2006
- Photonics integrated circuits on plasma-polymer-HMDSO, Single-mode TE(00)-TM(00) straight waveguides, S-bends, Y-junctions and mach-zehnder interferometers.
T. Begou, B. Becheb, A. Goullet, A. Granier, C. Cardinaud, E. Gaviot, V. Raballand, J P. Landesman and J. Zyss. Iecon 2006 - 32nd {Annual} {Conference} on {Ieee} {Industrial} {Electronics}, {Vols} 1-11 2006, 56, 850-854
- Study of magnetic field influence on charged species in a low pressure helicon reactor.
R. Smid, A. Granier, A. Bousquet, G. Cartry and L. Zajickova. Czech. J. Phys. 2006, 56, B1091-B1096
- Growth and modification of organosilicon films in PECVD and remote afterglow reactors.
P. Supiot, C. Vivien, A. Granier, A. Bousquet, A. Mackova, D. Escaich, R. Clergereaux, P. Raynaud, Z. Stryhal and J. Pavlik. Plasma Process. Polym. 2006, 3, 100-109
- Limits of the PECVD process for single wall carbon nanotubes growth.
A. Gohier, T M. Minea, A M. Djouadi, A. Granier and M. Dubosc. Chem. Phys. Lett. 2006, 421, 242-245
- Characterization of carbon nanotubes and carbon nitride nanofibres synthesized by PECVD.
S. Point, T. Minea, M P. Besland and A. Granier. Eur. Phys. J.-Appl. Phys 2006, 34, 157-163
- Comparison of structure and mechanical properties of SiO(2)-like films deposited in O(2)/HMDSO pulsed and continuous plasmas.
A. Bousquet, V. Bursikova, A. Goullet, A. Djouadi, L. Zajickova and A. Granier. Surf. Coat. Technol. 2006, 200, 6517-6521
- Mechanisms involved in the conversion of ppHMDSO films into SiO2-like by oxygen plasma treatment.
Agnes Granier, Gael Borvon, Angelique Bousquet, Antoine Goullet, Christiane Leteinturier and Arie van der Lee. Plasma Process. Polym. 2006, 3, 365-373
- Influence of plasma pulsing on the deposition kinetics and film structure in low pressure oxygen/hexamethyldisiloxane radiofrequency plasmas.
A. Bousquet, A. Granier, A. Goullet and J P. Landesman. Thin Solid Films 2006, 514, 45-51
- Low temperature plasma carbon nanotubes growth on patterned catalyst.
M. Dubosc, T. Minea, M P. Besland, C. Cardinaud, A. Granier, A. Gohier, S. Point and J. Torres. Microelectron. Eng. 2006, 83, 2427-2431
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