Antoine Goullet, Agnès Granier, Mireille Richard-Plouet
PhDs : Maria Mitronika (Thèse 2020), Simon Chouteau [2020-2023], Julien Chevet [2021-2024]
The synergy between the Soft Chemistry and PECVD skills (link to the Thin Film PECVD sub-topic) has made it possible to develop and optimise an innovative hybrid process: consisting of injecting a colloidal solution into a low-pressure plasma. The use of low pressure plasma allows, compared to the approaches developed at atmospheric pressure, a better control and modulation of the energy transfer to the active species (radicals and ions) of the plasma. On the other hand, our specificity consists in using colloidal solutions of nanoparticles, NPs, (link to the sub-theme Chemical deposition of transition metal oxides in Thin Films) prepared in the laboratory, stable in selected organic solvents, to produce nanocomposite thin films (NCs) formed of NPs dispersed in a matrix.
These materials with tunable optical index and dielectric constant are good candidates for the development of optical and electrical Integrated Passive Devices.
Keywords : Physics of low-pressure plasma, PECVD process and coupling with chemistry in solution, Plasmas diagnostics, Plasma-Surface interactions
Collaborations LAPLACE (Toulouse), Université de Montréal (Canada), CEITEC (République tchèque)
Expertises PECVD, Chemistry in solution, Ellipsometry