Stylus Profiler

(updated 2022, June 28th)

Person in charge

Benoit ANGLERAUD

Typical measurements :

• • • Height measurements by mechanical scanning of a tipped-stylus on the surface of a solid sample
    • Thickness measures of material thin films from several nm to 1 mm (step height measurements)
    • Measurements of surface curvature radius
    • Roughness measurements
    • Residual stress measurements of thin films
    • 3D mapping

Equipment :

Stylus profiling system model: P7 -  KLA
Diamond tipped-stylus : curvature radius of 2 µm

View of the sample holder (at the bottom of image), measure head (top of the image),
view of the tipped-stylus and of the sample (center of image).

 Main Characteristics

•    Vertical resolution (vertical axis) : 1 nm
•    Reproducibility 1.5 nm
•    Total dynamic range : up to 1 mm
•    Scan length (X axis) : from 20 µm to 150 mm
•    Maximum points per scan : 2 millions
•    Sampling rate : 5 to 2000 Hz
•    Stylus force : 0.5 up to 50 mg
•    Lateral resolution 2D (X scan axis) : 25 nm
•    Lateral resolution 3D (Y axis) : 0.5 µm
•    Sample holder chuck diameter : 156 mm
•    Motorized X, Y and Z stages
•    X and Y stages : 2 µm repeatability
•    Motorized théta stage : 360° (résolution 0.1°)
•    Sample height : from several hundreds of micrometers to 50 mm

Example

Measurement of a 86 nm step height standard