ANR PERFORM - English
Electrodes 3D déposées par plasma pour les micro-supercondensateurs

Janvier 2024 – Juin 2027
Coordinateur IMN du projet : Jérémy BARBE (équipe PCM)
Personnels IMN impliqués :
Pierre-Yves JOUAN (PR UNIV), Marie-Paule BESLAND (DR CNRS), Thierry BROUSSE (PR CNRS), Nicolas GAUTIER (IE CNRS), Eric GAUTRON (IE CNRS)
Current research into micro-supercapacitors aims to increase energy density while maintaining high power density. Progress is mainly focused on the development of 3D architectures to increase the specific surface area. However, the conformal deposition of thin-film electrodes on 3D substrates remains a technological challenge. It is essential to develop a technique that enables conformal deposition of thin films on high aspect ratio microstructures, while offering sufficient freedom to control the microstructural and electrochemical properties of the deposited materials. The high power impulse magnetron sputtering (HiPIMS) technology has the potential to meet these objectives, as it benefits from a high degree of ionization of the sputtered material. The PERFORM project aims to study the conformal deposition of titanium nitride (TiN) thin-film electrodes by HiPIMS on high aspect ratio microstructured substrates for micro-supercapacitors. The project will be based on the new power source developed at IMN, enabling the generation of up to 6 synchronized voltage pulses, controlled to the microsecond, during a single discharge. Initially, the project will aim to characterize e-HiPIMS Ar-Ti-N2 plasmas using time-resolved techniques such as mass spectrometry and optical emission spectroscopy (WP1). Then, advanced material characterizations (XPS, HRTEM...) will be carried out to understand how plasma parameters can influence the conformity and microstructure of capacitive titanium nitride and pseudo-capacitive vanadium oxynitride layers deposited on high aspect ratio silicon microstructures (WP2 and WP3). Finally, these 3D and nanostructured electrodes will be integrated and characterized as functional materials in micro-supercapacitors (WP4).