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Etching of steel in chlorine-based plasmas: modelling and characterization.

Ahmed Rhallabi, Christophe Cardinaud, Aurélie Girard, Post-doctoral researcher : Guillaume Le Dain [2018-2020]

SPOT les2 AhmedThe ANR SPOT project aims to develop a reactive plasma etching process to pattern the surface of austenitic and martensitic type steel parts down to the submicron scale. The etchings give the structured metal parts reinforced and durable tribological properties, which can be used in severe environments. Candidates for the replacement of parts usually made of more noble non-recyclable material or covered with a hard thin layer (DLC, TiN), they will then ensure economic and ecological gain. In this context, we have developed an etching simulator of steel under ICP Cl2/Ar plasma. The multi-scale approach has the advantage of predicting the spatio-temporal evolution of structures etched through masks as a function of machine parameters. The chemical composition of different types of steel is taken into account in the cellular approach based on the Monte-Carlo method, which studies the etching kinetics under the fluxes of reactive neutral species and energetic ions. The effects of certain parameters, such as the chemical composition of steels and the probability of Cl adsorption, on certain etching properties such as roughness, lateral over-etching, etch rate were highlighted. Analyzes of etched steel surfaces by XPS will allow a better understanding of the interaction mechanisms between the active species from the plasma and the steel surface. This will help to develop a surface model based on the Monte-Carlo probabilistic technique consistent with experimental observations.

Keywords              Plasma, Etching, Modelling, Steel, Chlore
Collaborations      IGL, C2N, SILSEF


Tags: Fernandez Rhallabi

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