Fabrication of Thin Perovskite Layers via Reactive Sputtering for Microdevices for Electrochemical Energy Storage
Abstract:
The development of the Internet of Things (IoT) is driving a growing need for microdevices for localized electrical energy storage and power supply. Perovskite oxides, with the generic formula ( ABO3 ), are attracting increasing interest as anode materials for high-power Li-ion microbatteries. We propose a novel strategy for fabricating LaxNbO3 and LaxTiO3 perovskite thin films by co-sputtering, partially replacing lanthanum at the A site with vacancies. The aim is to provide an alternative to the anode materials typically used for microbatteries, such as metallic lithium or Li4Ti5O12 . The creation of a vacancy network within the perovskite layer aims to facilitate lithium insertion and rapid ion diffusion within the material.
In this doctoral research, thin films were deposited by reactive magnetron sputtering using lanthanum and niobium or lanthanum and titanium targets. The thin films were crystallized during post-deposition annealing at high temperatures (T ≥ 1000 °C). Several techniques were used to characterize the structural and chemical properties of the thin films, as well as their electrochemical properties via cyclic voltammetry and galvanostatic cycling. Characterizations using X-ray absorption spectroscopy and in-situ X-ray diffraction were specifically developed to provide insights into the charge storage mechanisms in these materials.
Keywords: Perovskite material, Thin film, Magnetron sputtering, Energy storage, Electrochemistry, Lithium-ion battery, Microbattery
Perovskite-based thin films deposited by reactive magnetron sputtering for high-power electrochemical energy storage microdevices
Abstract:
The development of the Internet of Things (IoT) is driving a growing need for electrical energy storage micro-devices. Perovskite-based oxides, of general formula ABO 3 , are attractive increasing interest as anode materials for high-power Li-ion micro-batteries. In this work, we investigate a novel strategy for manufacturing La x NbO 3 and La x TiO 3 perovskite thin films by co-sputtering, based on the partial substitution of lanthanum at the A-site with vacancies. The aim is to provide an alternative to standard anode materials such as lithium and Li 4 Ti 5 O 12 , used in microdevices. Creating a vacancy network within the perovskite layer is intended to facilitate lithium insertion and enable rapid ionic diffusion within the material.
To achieve this, the thin films were deposited by reactive magnetron co-sputtering of two targets (i.e., lanthanum/niobium or lanthanum/titanium). Crystallization of the thin films was induced through high-temperature (T ≥ 1000°C) post-deposition annealing. Several techniques were used to characterize the structural and chemical properties of the films, as well as their electrochemical properties via cyclic voltammetry and galvanostatic cycling. Operando X-ray absorption spectroscopy and X-ray diffraction characterizations were also specifically developed to gain a better understanding of the charge storage mechanisms in these materials.
Keywords: Perovskite materials, Thin films, magnetron sputtering, energy storage, electrochemistry, Li-ion, microbattery
