The Plasmas and Thin Films team conducts research on the development of cold plasma processes. The research strategy uses other physico-chemical processes than plasmas alone: sol-gel, chemical desalloying. The activities are structured according to three research themes: etching, the deposition of thin layers and the deposition of nano-objects and nano-materials which are complemented by a transversal modelling theme. The research projects concern a wide range of sectors:
-micro- and nano-technology,
-coatings and surface treatments.
The detailed study of plasma/surface interaction mechanisms, the development of new plasma processes, the implementation of modelling in support of experimental activity and the optimisation of the synthesis of a material with a given property are at the heart of the team's activities.
The team collaborates with external partners who have the technological means of microfabrication for the integration of materials in a device.
-Cold plasma processes for thin-film deposition and plasma etching
-Processes coupling plasma and chemistry in solution during and after plasma treatment
-Multi-scale modelling of plasma processes
-Cold plasma diagnostics (OES, Mass Spectrometry, probes)
Characterisation of thin films and in particular X-ray Photo Electron Spectroscopy (XPS)