Directory

Senior Lecturer

CNRS Research Director

CNRS Research Fellow

Current functions Currently:

Since 2013: CNRS Research Scientist

Functions precedents / Before:

• 2010-2013: Postdoctoral Fellow / Northwestern University (USA)
• 2007-2010: PhD / University of Rennes (France)

Ressources en ligne – Online resources:

• ResearcherID : E-2532-2012
• ResearchGate: https://www.researchgate.net/profile/Romain_Gautier2
• Google Scholar : https://scholar.google.fr/citations?user=BiIoyN0AAAAJ&hl=en

Current functions

• CNRS research engineer, PhD.
• Specialist in transmission electron microscopy (high-resolution corrected S/TEM imaging, spectroscopies: EDX and monochromate EELS, electron diffraction, tomography…).
• Member of the PLASSMAT platform operational committee (2023-…)
• Member of the PLASSMAT platform steering committee (2023-2025)

Previous functions

• Head of MET at IC2MP in Poitiers (2001-2005)
• Elected to the IC2MP Laboratory Council (2002-2005)
• Elected to the IMN Laboratory Council (2012-2016)
• IT correspondent at the IMN management office (2017-2019)

Qualifications
2010-2014: PhD thesis, University of Nantes: Characterization of polycrystalline heterostructures by transmission electron microscopy: application to Cu(In,Ga)Se2-based solar cells
1998-1999: DESS in Microstructural Analysis of Materials, University of Poitiers
1997-1998: Maitrise in Physical Sciences, University of Nantes

Recent or current research projects

• ANR Compagnon project “Piezo-magnetic composite by field sintering” (2023-2027)
• European OPINCHARGE project “OPerando analyses and modelling of INterface dynamics and CHARGE transport in lithium-ion batteries” (2023-2026)
• ANR Iodine-CLEAN-UP project “Iodine: Conditioning this long half-life element in pressurized nuclear glass and glass-ceramics” (2020-2025)
• ANR Acetone project “Radiation chemistry as a powerful tool for controlling the properties of nanometric materials” (2020-2024)
• ANR EPCIS project “High-efficiency CIGS-Silicon Epitaxial Tandem Cells” (2020-2024)

Professional networks

• Member of the French Microscopy Society (SFµ)
• Member of the European Microscopy Society (EMS)
• Member of the Philips Microscope Users Group (GUMP)

Publications

February 2024:

• More than 100 publications (h-index : 26 – source Web of Science)
• 2 invited seminars / 2 oral presentations at international conferences / 7 posters

Recent publications:

• Structural and property engineering of 2D titanium carbides (MXene) thin films using ion irradiation.
  BENMOUMEN, Ayoub, DAVID, Marie-Laure, GAUTRON, Eric, et al.
  Applied Surface Science, 2024, vol. 652, p. 159206.
• Radiolysis of Thin Water Ice in Electron Microscopy
  Patricia Abellan*, Eric Gautron, and Jay A. LaVerne*
  J. Phys. Chem. C 2023, 127, 31, 15336-15345
• Hexagonal Tungsten Bronze H0.25Cs0.25Nb2.5W2.5O14 as a Negative Electrode Material for Li-Ion Batteries
  Etienne Le Calvez, Julio César Espinosa-Angeles, Éric Gautron, Éric Quarez, Olivier Crosnier, and Thierry Brousse*
  Chem. Mater. 2023, 35, 8, 3162-3171
• Crystal structures, frustrated magnetism, and chemical pressure in Sr-doped Ba3NiSb2O9 perovskites.
  Melanie Viaud, Catherine Guillot-Deudon, Eric Gautron, Maria Teresa Caldes, Guido Berlanda, Philippe Deniard, Philippe Boullay, Florence Porcher, Carole La, Celine Darie, A. Zorko, A. Ozarowski, Fabrice Bert, Philippe Mendels and Christophe Payen.
  Physical Review Materials 2022, 6
• Epitaxial growth of CIGSe layers on GaP/Si(001) pseudo-substrate for tandem CIGSe/Si solar cells.
  Nicolas Barreau, Olivier Durand, Eugène Bertin, Antoine Létoublon, Charles Cornet, Polyxeni Tsoulka, Eric Gautron and Daniel Lincot.
  Sol. Energy Mater. Sol. Cells 2021, 233, 111385
• Design of metastable oxychalcogenide phases by topochemical (de)intercalation of sulfur in La2O2S2.
  Shunsuke Sasaki, Maria Teresa Caldes, Catherine Guillot-Deudon, Isabelle Braems, Gwladys Steciuk, Lukas Palatinus, Eric Gautron, Gilles Frapper, Etienne Janod, Benoit Corraze, Stephane Jobic and Laurent Cario.
  Nat Commun 2021, 12, 3605
• Toward the Coordination Fingerprint of the Edge-Sharing BO4 Tetrahedra..
  Eric Quarez, Eric Gautron, Michael Paris, David Gajan and Jean-Yves Mevellec.
  Inorg. Chem. 2021, 60, 2406-2413

Communication since 2019

Invited presentations:
– “Apport de la MET à l’analyse structurale des cellules solaires à base de Cu(In,Ga)(S,Se)2″, GDR Chalco (Montpellier, 2025)
” Exemples d’applications du S/TEM Nant’Themis en sciences du vivant “, journée scientifique Axe bio-imagerie de Biogenouest: La microscopie électronique en sciences de la vie, ONIRIS (Nantes, 2022)
– “Le MET Nant’Themis : premières résultats après un an d’utilisation”, invited seminar at IC2MP (Poitiers, 2019)
– “Automated acquisitions with SerialEM: applications in cryo-microscopy and electron crystallography”, IMN in-house seminar (Nantes, 2019)

Presentations:
– “Microstructural characterization of CIGS/GaP/Si-based tandem solar cells”, SFµ Congress (Rouen, 2023)

Posters:
– SFµ Congress (Toulouse, 2025)
– SFµ Congress (Rouen, 2023)
– Folle Journée de l’imagerie Nantaise (Nantes, 2019)
– SFµ Congress (Poitiers, 2019)

Newsletters:
– European Microscopy Society Yearbook (2019)

Workshop:
– Organization of the Advanced Direct Detection EELS Workshop on the Nant’Themis with Gatan (2019)

Inaugurations/visits:
Visit from Jacques Maddaluno, Director of the CNRS Institute of Chemistry, and Alexandre Legris, Deputy Scientific Director in charge of sections 11 and 15 (2023)
– Visit from Antoine Petit, CEO of CNRS
– Demonstration of the Nant’Themis in front of ESR Minister Frédérique Vidal
– Organization of the inauguration of the Nant’Themis (2019)

General public:
– Organization and running of the “Microscopy: how to see the infinitely small?” workshop at the “Nuit Blanche des Chercheurs” (Nantes, 2020)
– Video “Nantes : La nuit blanche des chercheurs a pour thème “Preuves en images””, France3-régions (2020)
– Video “NANT’THEMIS – Un microscope parmi les plus performants du monde installé à l’IMN”, Nantes Université (2019)

Senior Lecturer

Functions :

• 2014-… Lecturer, Nantes University, IMN PCM (Plasma Couches Minces) team.
• 2013-2014 Maturation engineer, SATT, France, Ouest Valorisation, BatElecCir.
• 2011-2013 ATER, Université de Rennes 1, France, UFR sciences et propriétés de la matière, SPI specialization, IETR, UMR6164.
• 2010-2011 ATER, University of Rennes 1, IUT GEII, France, IETR, UMR 6164.
• 2009-2010 Postdoctorate, ENS Cachan Bretagne, France, BIOMIS team, SATIE, UMR 8029.

Qualifications :

• 2005-2008 PhD in Electronic Engineering, University of Rennes 1, Rennes, France.

Suspended-gate transistor electronic detection of protein markers linked to iron metabolism.

Thesis in the Microelectronics and Microsensors Department (D2M) of the IETR (Institut d’Electronique et des Technologies du numéRique).

• 2002-2005 M.Sc.A: Master of Applied Sciences, University of Sherbrooke, Canada.

Design and manufacture of a calorimeter for living cells.

Master’s degree in electrical engineering, majoring in microelectronics, with research project in collaboration with MIT and the University of Auckland in New Zealand.

• 2001-2002 Maîtrise EEA, Université de Marne-La-Vallée, France.

Master’s degree in Electronics, Electrical Engineering and Automation, specializing in electronics, microelectronics and optronics.

• 1998-2001 ESTE, École Supérieure de Technologie Électronique, France.

Part of the ESIEE group, this three-year program offers an international level certified Bachelor of Engineering degree in electronics. Specializing in electronics and microelectronics.

Expertises :

• Etching processes in fluorine-based plasmas (SF6, CHF3, CF4, C2F6).
• Analysis of materials and surfaces using X-ray photoelectron spectroscopy.

Main research themes:

His scientific interests cover functionalization aspects and recurring issues in plasma etching, as well as process development. His current research focuses on cryo-ALE (Cryogenic Atomic Layer Etching) and all the mechanisms involved at the plasma-surface interface during this type of treatment.

Biography:

Aurélie GIRARD graduated from the Université de Sherbrooke in 2005, as an electrical engineer specializing in biosensors and microfabrication in collaboration with the University of Auckland and MIT on “Fabrication of a microcalorimeter to measure the thermodynamic properties of a living cell”. With a PhD in electrical engineering from the University of Rennes (2008), specializing in microelectronics linked to biosensors, his research topics, carried out during his thesis and several post-doctorates, combine processes for manufacturing and characterizing microelectronic devices and chemical surface functionalization for grafting biological species: firstly on the fabrication and electrochemical functionalization by diazonium salts of nanostructures and devices based on different silicon compounds, then on the design and fabrication of electrochemical multi-sensors for the analysis of markers of neurological lysosomal storage and acute strokes. This project was carried out in collaboration with ENSCP. Finally in 2014, she joined the Plasmas and Thin Films group at IMN in Nantes, to work as a teacher-researcher on the dry etching of materials with microelectronics applications, using low-pressure RF reactive plasmas.

Teaching :

At Nantes University since September 2014, its teaching courses deal mainly with electronics and physics in L1, L3, M1 and M2 (initial training or offered on a sandwich course basis (M2)) with a classic organization (lectures, TD and TP) but also in the form of projects.

Publications :

Number of publications

• More than 25 publications, including 12 since 2019.
• More than 20 communications since 2019.
• Online resource: Researchgate : http://www.researchgate.net/profile/Aurelie_Girard3

Major illustrative publications:

• “An insight on plasma-surface interaction mechanisms during cryoetching in SiF4-O2, using in situ XPS”;
  C. Cardinaud, A. Girard, G. Antoun, J. Nos, T. Tillocher, R. Dussart; Plasma Etch and Strip for Microelectronics (PESM), Leuven, Belgium, September 19-23, 2022.
• “Quasi In Situ XPS on a SiOxFy Layer Deposited on Silicon by a Cryogenic Process”;
  G. Antoun, A. Girard, T. Tillocher, P. Lefaucheux, J. Faguet, K. Maekawa, C. Cardinaud and R. Dussart. Dussart; ECS J. Solid State Sci. Technol. 2022, 11, 013013.
• “Surface composition and micromasking effect during the etching of amorphous Ge-Sb-Se thin films in SF6 and SF6 /Ar plasmas”;
  T Meyer, A. Girard, G LeDain, A. Rhallabi, E. Baudet, V. Nazabal, P. Nemec and C. Cardinaud. Appl. Surf. Sci. 2021, 549, 149192.
• “Investigation of organic precursors and plasma mixtures allowing control of carbon passivation when etching HgCdTe in hydrocarbon-based inductively coupled plasmas”;
  J. Piet, W. Faider, A. Girard, F. Boulard and C. Cardinaud. Journal of Vacuum Science & Technology A 2020, 38, 053005.

LinkedIn link :https://www.linkedin.com/in/aurelie-girard-5916091b/

University Professor

Functions :

Research Professor at Polytech Nantes, Deputy Director of Research at the Science and Technology Division of Nantes University

Qualifications :

University Professor, CE1, 63 CNU

Expertises :

• PECVD thin-film deposition of oxide dielectric materials.
• Nanocomposite thin films.
• UV-Visible ellipsometry and optical spectroscopy.
• Thin-film component technologies.

Main research themes:

• Development of innovative hybrid processes combining low-pressure plasma (PECVD) and injection of colloidal solutions for the deposition of nanocomposite materials
• Optical, electrical and catalytic properties of oxide nanocomposites (TiO2(NPs)/SiO2 (Matrix); ZnO (NPs)/SiO2(Matrix); FeOy (NPs)/ TiO2 (Matrix),….): from nano-object dispersion to multifunctional properties

Current research projects :

• ANR ADN project: Advanced Dielectric Nanocomposite thin films processed by hybrid aerosol / low pressure plasma for microelectronic capacitor applications (2025-2028), in collaboration with LAPLACE of Toulouse.
• Participation in the supervision of Sarah Hekking’s thesis in collaboration with the Université de Montréal (Pr Luc Stafford) and IRN-CNRS Controlled Multifunctional Nanomaterials.
• Nanocomposite thin films including Fe2O3 nanoparticles in a TiO2 matrix, produced by a hybrid deposition process combining plasma and solution injection.

Activities in the research community :

Member of GDRI -IRN Controlled Multifunctional Nanomaterials

Biography:

Antoine Goullet is University Professor (exceptional class) at Nantes University, and a member of the Jean Rouxel Materials Institute in Nantes (IMN – UMR 6502). His current research focuses on the synthesis and study of the optical and electrical properties of nanocomposite dielectric thin films. These materials are developed using innovative hybrid processes, combining injection of colloidal solutions with plasma-assisted vapor deposition (PECVD), operating at low pressure and low temperature. He has authored or co-authored over 80 scientific publications in international journals. He has supervised or co-supervised 10 doctoral theses, and supervised three post-doctoral fellows. Scientific leader of several ANR-funded projects, he has also coordinated a European project (PHC) and participated in over 60 thesis juries. After serving as Director of Research at Polytech Nantes (2016-2021), since January 2022 he has been Deputy Director of Nantes Université’s Science and Technology cluster, in charge of research issues.

Teaching :

In the engineering cycle at Polytech Nantes in the Electronics and Digital Technologies (ETN) department and in the PEIP D preparatory cycle at Polytech Nantes, linked to the BUT GEII course at the Nantes IUT.

• Semiconductor physics (C/TD/TP),
• Microelectronics (C/TD/TP),
• Physics and Technology (C/TD/TP),
• Follow-up of engineering projects with industrial customers,
• Apprentice tutoring,

At the interface with Human and Social Sciences and ETN :

• Professional network
• Sustainable Development and Corporate Social Responsibility

Publications :

More than 80

Major illustrative publications:

• Nanoscale dielectric properties of TiO2 in SiO2 nanocomposite deposited by hybrid PECVD method
  C. Villeneuve-Faure, M. Mitronika, A. P. Dan, L Boudou, W. Ravisy, M.P. Besland, M.. Richard-Plouet and A. Goullet
  Nano Express 5 (2024) 5, 015010; DOI 10.1088/2632-959X/ad220d
• Kinetics driving nanocomposite thin-film deposition in low-pressure misty plasma processes
  S. Chouteau, M. Mitronika, A. Goullet, M. Richard-Plouet, L. Stafford, A. Granier
  J. Phys. D: Appl. Phys. (2022) 55, 505303; DOI 10.1088/1361-6463/ac9ac2
• Unveiling a critical thickness in photocatalytic TiO2 thin films grown by plasma-enhanced chemical vapor deposition using real time in situ spectroscopic ellipsometry
  W. Ravisy, M. Richard-Plouet, B. Dey, S. Bulou, P. Choquet, A. Granier and A. Goullet
  J. Phys. D: Appl. Phys. (2021) 54, 445303; DOI 10.1088/1361-6463/ac1ec1
• In situ spectroscopic ellipsometry study of TiO2 films deposited by plasma enhanced chemical vapour deposition
  D. Li, M. Carette, A. Granier, J.P. Landesman, A. Goullet
  Appl. Surf. Sc. (2013) 283, 234; DOI 10.1016/j.apsusc.2013.06.091
• Optical spectroscopic analyses of OH incorporation into SiO2 films deposited from O2/TEOS plasmas
  A. Goullet, C. Vallée, A. Granier and G. Turban
  J. Vac. Sci. Technol. A (2000) 18, 2452; DOI 10.1116/1.1287152

Link to orcid: https://orcid.org/my-orcid?orcid=0000-0001-5411-4351

Link to scholar.google.fr: https://scholar.google.com/citations?user=8xWSg2wAAAAJ&hl=fr&oi=ao

LinkedIn link:https://www.linkedin.com/in/antoine-goullet-b1663110/

Research Director

Functions :

CNRS Research Director (DR1) at IMN (80%) and “Plasmas” Scientific Delegate at CNRS Ingénierie (20%)

Expertise :

Low-pressure cold plasma processes, PECVD thin film deposition from organometallic precursors, plasma diagnostics (OES, Langmuir probe, mass spectrometry).

Main research themes :

• deposition of thin films with dielectric, optical, photocatalytic and barrier properties (SiO2, SiOCH, TiO2) by plasma-assisted chemical vapor deposition (PECVD)
• deposition of multifunctional nanocomposite thin films by low-pressure plasma injection of colloidal solutions (TiO2:SiO2, ZnO:SiO2, etc.).
• study of plasma/surface interaction mechanisms
• global study of plasma processes for nanomaterial synthesis and thin-film deposition

Current research projects :

• Hybrid mist plasma deposition of nanocomposite thin films: injection of a colloidal solution into a low-pressure plasma.
• Nanocomposite thin films of iron oxide nanoparticles in a TiO2 matrix (in collaboration with UdM, Montreal)
• Nanocomposite thin films of TiO2 nanoparticles in a SiO2 matrix, dielectric properties (ANR ADN project, 2025-2028)

Activities in the research community :

• Member of the Board of Directors, Société Française du Vide
• Member of the Plasmas Froids network and GDR EMILI

Biography

• 2013-2021 : Deputy Director of IMN
• 2017-2020: Member of the CE08 Evaluation Committee of the Agence Nationale de la Recherche (French National Research Agency)
• 2012-2016: Appointed member of the Comité National de la Recherche Scientifique, section10
• 2005-2012: Head of the Plasmas and Thin Films team at IMN (25-30 people)
• 2012-2015: Member of the Board of the Ecole Doctorale 3MPL (Molecules, Matter and Materials in Pays de Loire)
• 2008-2011: Member of the ANR non-thematic evaluation committee (CSD2 then SIMI9)
• 2004-2006: Coordinator of the Cold Plasma Network of the MRCT (CNRS) (400 members)
• 2001-2003: Project manager at the CNRS SPI (Sciences pour l’Ingénieur) Department
• 1998-2005: Head of the PECVD team at IMN’s Plasma Thin Film Laboratory
• 1994-1997: Director of the GDR “Processes for depositing thin films usingorganosilicon plasmas“.
• 1986-1992: Research Associate (CR2 from 1986 to 1990, then CR1) at the Gas and Plasma Physics Laboratory (Orsay)